TZM Alloy Ion Implantation Components

Linear Formula:	Mo / 0.5% Ti / 0.8% Zr / 0.02% C
Material:	TZM Alloy
Purity:	0.4-0.54% Ti, 0.06-0.12 %Zr, 0.01-0.04% C, balance Mo
Size:	Per Drawings

 

Product Description

TZM (Titanium-Zirconium-Molybdenum) Alloy Ion Implantation Components are precision-engineered parts used in ion implantation equipment for semiconductor and materials processing industries. These components leverage the superior mechanical and thermal properties of TZM alloy, which provides high-temperature strength, excellent creep resistance, and outstanding wear resistance.

TZM alloy is a molybdenum-based material reinforced with small amounts of titanium, zirconium, and carbon. This composition enhances grain stability, hardness, and oxidation resistance, making it an ideal choice for high-energy ion implantation applications where durability and performance are critical.

 

Features & Properties

High-Temperature Strength: Maintains structural integrity even at temperatures above 1400°C.

Excellent Wear Resistance: Ensures long service life in high-energy environments.

Superior Creep Resistance: Provides enhanced mechanical stability under thermal stress.

Good Oxidation Resistance: Withstands extreme operating conditions in vacuum environments.

High Purity & Low Outgassing: Suitable for semiconductor applications requiring ultra-clean materials.

 

Product Specifications

Material Composition: Mo-0.5% Ti-0.08% Zr-0.02% C

Density: ~10.2 g/cm³

Melting Point: ~2610°C

Hardness: ≥250 HV

Tensile Strength: ≥700 MPa (at room temperature)

Thermal Conductivity: ~126 W/m·K

Size & Shape: Customizable to meet specific ion implantation equipment requirements

 

Product Forms

Ion Implantation Chambers

Ion Beam Apertures

Beam Collimators

Electrode Plates

Filaments

Arc slits

Holders

Cathodes

Custom Machined Components

 

Production Method & Production Equipments

Production Method:

Powder Metallurgy Processing: High-purity molybdenum powder is mixed with titanium, zirconium, and carbon.

Compaction & Sintering: The powder mixture is compressed and sintered under vacuum to form a dense material.

Hot Rolling & Forging: The sintered billet undergoes rolling or forging to enhance mechanical properties.

Precision Machining: Advanced CNC machining and EDM (Electrical Discharge Machining) are used to create complex geometries.

Surface Treatment: Components are polished and treated for improved performance in vacuum environments.

Quality Inspection: Strict testing ensures dimensional accuracy and material consistency.

Production Equipments:

Vacuum Sintering Furnace

Hot Rolling Mill

CNC Machining Centers

Wire EDM & Laser Cutting Machines

Surface Polishing & Finishing Equipment

X-Ray Fluorescence (XRF) Analyzer for Material Verification

 

Applications & Related Industries

Semiconductor Manufacturing: Used in ion implantation machines for doping silicon wafers.

Aerospace & Defense: Applied in high-temperature plasma and particle accelerator technologies.

Thin Film Deposition: Essential for sputtering and PVD (Physical Vapor Deposition) systems.

Medical Technology: Used in ion beam therapy and radiation shielding components.

Energy Sector: Utilized in nuclear fusion research and high-energy physics applications.

 

Interesting Facts

TZM alloy is widely used in semiconductor fabrication because it exhibits minimal contamination and outgassing in vacuum environments.

The addition of titanium and zirconium to molybdenum enhances its mechanical properties by refining grain structure.

Ion implantation is a critical process in modern microelectronics, allowing for precise modification of semiconductor properties.

TZM components extend the lifespan of ion implantation systems by resisting erosion from high-energy ion bombardment.

 

Synonyms

TZM Ion Implantation Parts

TZM Alloy Ion Beam Components

Titanium-Zirconium-Molybdenum Ion Implantation Materials

Molybdenum Alloy Implantation Accessories

 

Health & Safety Information

Handling Precautions: Avoid inhaling fine dust when machining; use appropriate ventilation.

Storage Conditions: Store in a dry environment to prevent oxidation.

Protective Equipment: Use gloves and safety glasses when handling.

Disposal Considerations: Follow local regulations for metal waste disposal.

 

Why Choose Us for Your TZM Alloy Ion Implantation Components?

✔ High-Purity Materials: We use only premium-grade TZM alloy to ensure optimal performance.
✔ Custom Manufacturing: We offer tailored solutions based on your equipment specifications.
✔ Advanced Production Techniques: Precision machining ensures exact tolerances for ion implantation systems.
✔ Reliable Global Supply: Fast and secure delivery worldwide.
✔ Competitive Pricing: Premium quality with cost-effective solutions.

 

Contact Us Today

For pricing, technical specifications, or custom orders, contact our team today. We are ready to assist you in finding the best solution for your TZM Alloy Ion Implantation Components needs.

 

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